Wafer transfer robotter

Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.

NTJ series

Original drive mechanism provides highly accurate and smooth operations.

TTJ series

High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

NTH series

The long arm that is offset from the center of the base can access 4FOUP without a track.

NX series

Installation in a small space is possible, thanks to its compact arm construction.