Wafer transfer robots

Kawasaki has the No.1 market share in the wafer transfer clean robots.
The original drive mechanism provides highly accurate and rigid operations.
A single robot can access 2, 3 and 4FOUPs of EFEM without a track.
Compatible with SEMI-F47 and SEMI-S2 standards.
Transfers of ring frames and substrates are possible.
* Contact Kawasaki representative for details.

NTJ series

■Original drive mechanism provides highly accurate and smooth operations.

NTJ20

NTJ20

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series
NTJ10

NTJ10

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series

TTJ series

■ High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

TTJ10

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series
TTJ20

TTJ20

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series

NTH series

■The long arm that is offset from the center of the base can access 4FOUP without a track.

NTH20

NTH20

  • Payload
  • Max. Reach 1226.6mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTH series

NX series

■ Installation in a small space is possible, thanks to its compact arm construction.

NX420

NX420

  • Payload
  • Max. Reach 736mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NX series