Wafer transfer robots | Industrial Robots by Kawasaki Robotics https://kawasakirobotics.com/asia-oceania/robots-category/wafer/ Fri, 13 Jan 2023 06:08:11 +0000 en-AU hourly 1 https://www.altis-dxp.com/?v=6.2.4 https://kawasakirobotics.com/tachyon/sites/4/2022/02/cropped-site-icon.png?fit=32%2C32 Wafer transfer robots | Industrial Robots by Kawasaki Robotics https://kawasakirobotics.com/asia-oceania/robots-category/wafer/ 32 32 Wafer transfer robots https://kawasakirobotics.com/asia-oceania/robots-category/wafer/ Tue, 08 Feb 2022 05:10:10 +0000 urn:uuid:dd43c118-f1ac-4c8e-88d8-c03f400c1669 Kawasaki has the No.1 market share in the wafer transfer clean robots.
The original drive mechanism provides highly accurate and rigid operations.
A single robot can access 2, 3 and 4FOUPs of EFEM without a track.
Compatible with SEMI-F47 and SEMI-S2 standards.
Transfers of ring frames and substrates are possible.
＊ Contact Kawasaki representative for details.

NTJ series

■Original drive mechanism provides highly accurate and smooth operations.

NTJ20

NTJ20

  • Payload —
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series
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NTJ10

NTJ10

  • Payload —
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series
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TTJ series

■ High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

TTJ10

  • Payload —
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series
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TTJ20

TTJ20

  • Payload —
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series
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NTH series

■The long arm that is offset from the center of the base can access 4FOUP without a track.

NTH20

NTH20

  • Payload —
  • Max. Reach 1226.6mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTH series
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NX series

■ Installation in a small space is possible, thanks to its compact arm construction.

NX420

NX420

  • Payload —
  • Max. Reach 736mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NX series
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